The performance of Radio Frequency filters used for telecommunication purposes mainly depends on the frequency response curve of their building blocks, acoustic MEMS resonators. SAL is working with new types of piezoelectric materials and resonator designs, hence the characterization of these devices is very challenging. To cover the need of today’s telecom applications to understand the temperature behavior of RF-filters, the characterization must be done in an extended temperature range. The goal is to extract the main resonator specific parameters from the measurements as a function of temperature by comparison with theoretical models. In addition, the question of yield, homogeneity over the wafer and reproducibility must be addressed. The thesis consists in electrical characterization and experimental validation of the various strategies for ensuring proper parameter extraction of acoustic MEMS resonators.

The main tasks consist of:

• Literature review on electrical characterization of acoustic MEMS resonators.
• Design and validation of characterization strategies (frequency range, resolution, sweep characteristics, T-ramps).
• Experimental characterization of resonator performance using Vector-Network-Analyzer (VNA) and probe station.
• Data processing and parameter extraction by fitting to theoretical models (e.g. Butterworth Van Dyke, application of impedance matching) on wafer level.